High-sensitivity Fabry-Perot interferometric pressure sensor based on a nanothick silver diaphragm

被引：226

作者：

Xu, Feng ^{[1
]}

Ren, Dongxu ^{[1
]}

Shi, Xiaolong ^{[1
]}

Li, Can ^{[1
]}

Lu, Weiwei ^{[1
]}

Lu, Lu ^{[1
]}

Lu, Liang ^{[1
]}

Yu, Benli ^{[1
]}

机构：

[1] Anhui Univ, Sch Phys & Mat Sci, Hefei 230039, Peoples R China

来源：

OPTICS LETTERS | 2012年 / 37卷 / 02期

基金：

中国国家自然科学基金;

关键词：

OPTICAL-FIBER; MEMS;

D O I：

10.1364/OL.37.000133

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a fiber-optic extrinsic Fabry-Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0-50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors. (C) 2012 Optical Society of America

引用

页码：133 / 135

页数：3

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