On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater

被引：9

作者：

Tang, Jialei ^{[1
,2
]}

Lin, Jintian ^{[1
]}

Song, Jiangxin ^{[1
,2
]}

Fang, Zhiwei ^{[1
,3
]}

Wang, Min ^{[1
,2
]}

Liao, Yang ^{[1
]}

Qiao, Lingling ^{[1
]}

Cheng, Ya ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Shanghai 201800, Peoples R China

[3] Shanghai Tech Univ, Sch Phys Sci & Technol, Shanghai, Peoples R China

来源：

INTERNATIONAL JOURNAL OF OPTOMECHATRONICS | 2015年 / 9卷 / 02期

关键词：

microfabrication; integrated optics; microresonator; WHISPERING-GALLERY-MODE; FEMTOSECOND LASER; LABEL-FREE; MICROCAVITIES; MICROSPHERES; FABRICATION; FIBER;

D O I：

10.1080/15599612.2015.1034905

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on fabrication of a microtoroid resonator of a high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3-D) micromachining. The microheater, which is located about 200 mu m away from the microresonator, has a footprint size of 200 mu mx400 mu m. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The response time of the integrated chip is less than 10 seconds.

引用

页码：187 / 194

页数：8

共 25 条

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