MEMSMaster: A new approach to prototype MEMS

被引：1

作者：

Moulinier, D ^{[1
]}

Metsu, P ^{[1
]}

Brutails, MP ^{[1
]}

Bergeon, S ^{[1
]}

Nachtergaele, P ^{[1
]}

机构：

[1] Memscap, St Ismier, France

来源：

DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001 | 2001年 / 4408卷

关键词：

MEMS; nodal analysis; structured methodology; library;

D O I：

10.1117/12.425365

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

MEMS design environments are often FEM analysis centric. This relationship has kept MEMS design in a relative niche situation understood by experts. MEMSMaster implements a new design methodology for MEMS prototyping, based on a predefined set of parameterized elements composing dedicated libraries. It should ease access to MEMS technology to a wider audience.

引用

页码：165 / 174

页数：10

共 7 条

[1] A two-dimensional micromachined accelerometer [J].

Ahmad, H ;

AlKhalili, AJ ;

Landsberger, LM ;

Kahrizi, M .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1997, 46 (01) :18-26

[2]

Fedder G.K.L, 1994, THESIS UC BERKELEY

[3]

GEDDER G, 1997, INT C SOL STAT SENS, P1109

[4] A SURFACE MICROMACHINED SILICON ACCELEROMETER WITH ON-CHIP DETECTION CIRCUITRY [J].

KUEHNEL, W ;

SHERMAN, S .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 45 (01) :7-16

[5]

VANDEMEER JE, THESIS

[6]

VANDEMEER JE, 1998, NODAL DESIGN ACTUATO

[7]

ZHOU N, 1998, NODAL ANAL MEMS DESI

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