An optical MEMS pressure sensor based on a phase demodulation method

被引：22

作者：

Ge, Yixian ^{[1
]}

Wang, Ming ^{[1
]}

Chen, Xuxing ^{[1
]}

Rong, Hua ^{[1
]}

机构：

[1] Nanjing Normal Univ, Sch Phys Sci & Technol, Jiangsu Key Lab Optoelect Technol, Nanjing 210097, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 143卷 / 02期

基金：

高等学校博士学科点专项科研基金; 中国国家自然科学基金;

关键词：

optical fiber sensor; F-P interference; MEMS; phase demodulation;

D O I：

10.1016/j.sna.2007.10.086

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel optical fiber pressure sensor based on a Fabry-Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and common communication devices are used to fabricate the sensor. The principle of pressure measurement has been introduced; the relationship between silicon membrane size and sensor performance has been simulated. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting from intensity variations of a light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, and a wide pressure measurement range from 0 to 3 Mpa. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：224 / 229

页数：6

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