Determination the Optical Constants of Hafnium Oxide Film by Spectroscopic Ellipsometry with Various Dispersion Models

Optical constants of vacuum-deposited hafnium oxide film (HfO(2)) from infrared to ultraviolet spectral region (215nm-1700nm) have been determined by variable angle Spectroscopic ellipsometry with Cauchy dispersion model, Sellmeier dispersion model, Cauchy-Urbach dispersion model and Tauc-Lorentz dispersion model, respectively. The optical constants of the HfO(2) film which were extracted with the four dispersion models have been compared. The surface roughness layer between HfO(2) film and air and the interface layer between the film and the substrate have also been modeled with Bruggeman effective medium approximation (BEMA).