X-ray optics and beam characterization using random modulation: theory

被引:31
作者
Berujon, Sebastien [1 ]
Cojocaru, Ruxandra [1 ]
Piault, Pierre [1 ]
Celestre, Rafael [1 ]
Roth, Thomas [1 ]
Barrett, Raymond [1 ]
Ziegler, Eric [1 ]
机构
[1] European Synchrotron Radiat Facil, CS 40220, F-38043 Grenoble 9, France
关键词
speckle; near-field speckle-based phase-sensing; metrology; at-wavelength metrology; optics; GRATING INTERFEROMETER; IN-SITU; ABSORPTION; PHASE;
D O I
10.1107/S1600577520000491
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
X-ray near-field speckle-based phase-sensing approaches provide efficient means of characterizing optical elements. Presented here is a theoretical review of several of these speckle methods within the framework of optical characterization, and a generalization of the concept is provided. As is also demonstrated experimentally in a parallel paper [Berujon, Cojocaru, Piault, Celestre, Roth, Barrett & Ziegler (2020), J. Synchrotron Rad. 27, (this issue)], the methods theoretically developed here can be applied to different beams and optics and within a variety of situations where at-wavelength metrology is desired. By understanding the differences between the various processing methods, it is possible to find and implement the most suitable approach for each metrology scenario.
引用
收藏
页码:284 / 292
页数:9
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