Design of Compact 6-DOF Precision Aligner for Micro-assembly

被引：0

作者：

Yoo, Yong-Hwan ^{[1
]}

Sung, Yeon Wook ^{[1
]}

Lee, Soo-Hun ^{[1
]}

Hong, Min-Sung ^{[1
]}

Lee, Moon G. ^{[1
]}

机构：

[1] Ajou Univ, Div Mech Engn, Suwon 441749, Gyeonggi Do, South Korea

来源：

PROCEEDINGS OF THE ASME INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE, VOL 2 | 2009年

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This work will develop a 6 Degrees Of Freedom (DOF) precision aligner with a small size and a high resolution for the assembly of the micro-scale parts used in mobile electronics. The arrangement of actuators in the aligner is symmetrical, based on kinematic design. A VCM (Voice Coil Motor) actuator that is small and reliable will be applied to this aligner system. This paper presents the combination of two modules to form the mechanism for the 6-DOF precision aligner. The first is a stage that can control XY theta(Z) motion, while the second can control Z motion, i.e. Z tilt motion. According to its specifications, it is expected to satisfy precision requirements. Several tests will be carried out to confirm the specifications with PID control.

引用

页码：547 / 552

页数：6

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