Etching rate and structural modification of polymer films during low energy ion irradiation

被引：34

作者：

Zaporojtchenko, V ^{[1
]}

Zekonyte, J ^{[1
]}

Erichsen, J ^{[1
]}

Faupel, F ^{[1
]}

机构：

[1] Univ Kiel, Tech Fac, Chair Multicomponent Mat, D-24143 Kiel, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2003年 / 208卷

关键词：

ion irradiation effects; polymers; glass transition; X-ray photoelectron spectra - surface analysis;

D O I：

10.1016/S0168-583X(03)00625-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Various polymers were sputtered with low energy Ar+ ions of 1 keV in order to determine their etching rate. Hydrocarbons, oxygenated, fluorinated and nitrogen-containing glassy polymers with a broad range of the glass transition temperature (T-g,) were chosen. The etching rate was measured using a profilometer, and X-ray photoelectron spectroscopy. At the same time the surface chemical modification, and the surface glass transition temperature were studied. Comparing the sputter rate to the various polymer properties a correlation among the T-g, cross-link density, and sputter rate was found. In addition, the sputter rate as a function of the integral ion fluence proved to exhibit a sharp increase in the initial regime of very low fluence. The results are discussed in terms of the characteristics of the polymers. (C) 2003 Elsevier B,V. All rights reserved.

引用

页码：155 / 160

页数：6

共 20 条

[1]

ANDERSEN HH, 1981, SPUTTERING PARTICLE, V1, P166

[2]

BISWAS A, 2002, EMRS FALL M 14 19 SE

[3]

Brandrup J., 1999, Polymer handbook, VII

[4] INTERACTION OF ION-BEAMS WITH POLYMERS, WITH PARTICULAR REFERENCE TO SIMS [J].

BRIGGS, D ;

HEARN, MJ .

VACUUM, 1986, 36 (11-12) :1005-1010

[5]

CALGANO L, 1992, NUCL INSTRUM METH B, V65, P413

[6]

CALGANO L, 1991, NUCL INSTRUM METH B, V59, P1153

[7]

CHAN CM, 1994, POLYM SURFACE MODIFI

[8] HYDROGENATED CARBON LAYERS PRODUCED BY ION-BEAM IRRADIATION OF PMMA AND POLYSTYRENE FILMS [J].

DAVENAS, J ;

THEVENARD, P ;

BOITEUX, G ;

FALLAVIER, M ;

LU, XL .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4) :317-323

[9] Collision cascade and sputtering process in a polymer [J].

Delcorte, A ;

Bertrand, P ;

Garrison, BJ .

JOURNAL OF PHYSICAL CHEMISTRY B, 2001, 105 (39) :9474-9486

[10] Ion beam assisted unzipping of PMMA [J].

Fragala, ME ;

Compagnini, G ;

Torrisi, L ;

Puglisi, O .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 141 (1-4) :169-173

← 1 2 →