High-Performance Graphene/AlGaN/GaN Schottky Junctions for Hot Electron Transistors

被引:39
作者
Giannazzo, Filippo [1 ]
Greco, Giuseppe [1 ]
Schiliro, Emanuela [1 ]
Lo Nigro, Raffaella [1 ]
Deretzis, Ioannis [1 ]
La Magna, Antonino [1 ]
Roccaforte, Fabrizio [1 ]
Iucolano, Ferdinando [2 ]
Ravesi, Sebastiano [2 ]
Frayssinet, Eric [3 ]
Michon, Adrien [3 ]
Cordier, Yvon [3 ]
机构
[1] IMM, CNR, Str 8,5 Zona Ind, I-95121 Catania, Italy
[2] STMicroelectronics, Stradale Primosole 50, I-95121 Catania, Italy
[3] Univ Cote Azur, CRHEA, CNRS, Rue Bernard Gregory, F-06560 Valbonne, France
关键词
graphene; GaN; hot electron transistor; conductive atomic force microscopy; heterostructures; GRAPHENE BASE TRANSISTORS; BALLISTIC TRANSPORT; HETEROJUNCTION; SIMULATION; DENSITY; DEVICE; GAN;
D O I
10.1021/acsaelm.9b00530
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The electronic properties of the graphene (Gr) Schottky junction with an Al0.22Ga0.78N/GaN heterostructure on silicon have been investigated, both by experiment and with use of ab initio DFT calculations. A peculiarly high n-type doping (1.1 x 10(13) cm(-2)), observed for Gr in contact with AlGaN, was explained by the combined effect of Fermi level pinning by AlGaN surface states and charge transfer. Spatially uniform current injection across the Gr/AlGaN/GaN heterojunction was revealed by nanoscale resolution conductive atomic force microscopy (CAFM) analyses. Furthermore, a Gr/AlGaN/GaN Schottky diode with excellent rectifying behavior has been demonstrated and used as the key building block for a hot electron transistor (HET) with a 10 nm Al2O3 base-collector barrier. Thanks to the highly efficient hot electron injection from the AlGaN/GaN emitter, this transistor exhibits high on-state current density (J(C,ON) approximate to 1 A/cm(2)), high on-state over off-state current density ratio (J(C,ON)/J(C,OFF) approximate to 10(6)), and a common-base current gain alpha approximate to 0.15, solely limited by the high Al2O3 base-collector barrier. The excellent performances of the Gr/AlGaN/GaN Schottky junction represent an important step toward the development of a HET technology compatible with the state-of-the-art GaN high electron mobility transistors.
引用
收藏
页码:2342 / 2354
页数:25
相关论文
共 53 条
[1]   Two-dimensional electron gases induced by spontaneous and piezoelectric polarization charges in N- and Ga-face AlGaN/GaN heterostructures [J].
Ambacher, O ;
Smart, J ;
Shealy, JR ;
Weimann, NG ;
Chu, K ;
Murphy, M ;
Schaff, WJ ;
Eastman, LF ;
Dimitrov, R ;
Wittmer, L ;
Stutzmann, M ;
Rieger, W ;
Hilsenbeck, J .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (06) :3222-3233
[2]   Radio-frequency plasma-excited molecular beam epitaxy growth of GaN on graphene/Si(100) substrates [J].
Araki, Tsutomu ;
Uchimura, Satoru ;
Sakaguchi, Junichi ;
Nanishi, Yasushi ;
Fujishima, Tatsuya ;
Hsu, Allen ;
Kim, Ki Kang ;
Palacios, Tomas ;
Pesquera, Amaia ;
Centeno, Alba ;
Zurutuza, Amaia .
APPLIED PHYSICS EXPRESS, 2014, 7 (07)
[3]   Influence of oxide substrates on monolayer graphene doping process by thermal treatments in oxygen [J].
Armano, Angelo ;
Buscarino, Gianpiero ;
Cannas, Marco ;
Gelardi, Franco Mario ;
Giannazzo, Filippo ;
Schiliro, Emanuela ;
Lo Nigro, Raffaella ;
Agnello, Simonpietro .
CARBON, 2019, 149 :546-555
[4]   HOT-CARRIER TRIODES WITH THIN-FILM METAL BASE [J].
ATALLA, MM ;
SOSHEA, RW .
SOLID-STATE ELECTRONICS, 1963, 6 (03) :245-250
[5]   A NEW AND SIMPLE-MODEL FOR GAAS HETEROJUNCTION FET GATE CHARACTERISTICS [J].
CHEN, CH ;
BAIER, SM ;
ARCH, DK ;
SHUR, MS .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (05) :570-577
[6]  
Cheng CC, 2019, S VLSI TECH, pT244, DOI 10.23919/VLSIT.2019.8776498
[7]   Barrier height estimation of asymmetric metal-insulator-metal tunneling diodes [J].
Cowell, E. William, III ;
Muir, Sean W. ;
Keszler, Douglas A. ;
Wager, John F. .
JOURNAL OF APPLIED PHYSICS, 2013, 114 (21)
[8]   Role of basis sets on the unfolding of supercell band structures: From tight-binding to density functional theory [J].
Deretzis, I. ;
Calogero, G. ;
Angilella, G. G. N. ;
La Magna, A. .
EPL, 2014, 107 (02)
[9]   Role of covalent and metallic intercalation on the electronic properties of epitaxial graphene on SiC(0001) [J].
Deretzis, I. ;
La Magna, A. .
PHYSICAL REVIEW B, 2011, 84 (23)
[10]   Simulations of Graphene Base Transistors With Improved Graphene Interface Model [J].
Di Lecce, Valerio ;
Gnudi, Antonio ;
Gnani, Elena ;
Reggiani, Susanna ;
Baccarani, Giorgio .
IEEE ELECTRON DEVICE LETTERS, 2015, 36 (09) :969-971