Dependence of electric field on pressure in an RF resonance method

被引:0
作者
Goto, N [1 ]
机构
[1] Cent Res Inst Elect Power Ind, Komae, Tokyo 2018511, Japan
来源
INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GASES, VOL IV, PROCEEDINGS | 1999年
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D O I
暂无
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
引用
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页码:165 / 166
页数:2
相关论文
共 5 条
[1]   Plasma density control in a low-pressure RF resonant field [J].
Goto, N .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (04) :428-433
[2]  
GOTO N, IN PRESS J APPL PHYS
[3]   Plasma-sheath resonances and energy absorption phenomena in capacitively coupled radio frequency plasmas. Part I [J].
Ku, VPT ;
Annaratone, BM ;
Allen, JE .
JOURNAL OF APPLIED PHYSICS, 1998, 84 (12) :6536-6545
[4]   Electric field distribution in plasma during ion extraction by a radio frequency resonance method [J].
Matsui, T ;
Tsuda, S ;
Tsuchida, K ;
Suzuki, K ;
Shoji, T .
PHYSICS OF PLASMAS, 1997, 4 (10) :3527-3532
[5]   Ion extraction from plasma by using a radio frequency resonant electric field [J].
Matsui, T ;
Tsuchida, K ;
Tsuda, S ;
Suzuki, K ;
Shoji, T .
PHYSICS OF PLASMAS, 1996, 3 (12) :4367-4375