Plasma immersion ion implantation for improvement of mechanical properties of AISI M2 steel

被引：9
作者：
Uglov, VV
Khodasevich, VV
Kuleshov, AK
Fedotova, JA
Rusalsky, DP
Guenzel, R [1 ]
Richter, E
机构：
[1] Rossendorf Inc, Res Ctr, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany
[2] Belarusian State Univ, Dept Solid State Phys, Minsk 220080, BELARUS
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 02期
关键词：
D O I：
10.1116/1.590665
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Plasma immersion (PI3) ion implantation of AISI M2 steel by nitrogen was carried out. The implantation voltage was 40 kV and the doses varied in the range of 2-8 x 10(18) ions/cm(2). It is established that the hardness of steel increases up to 25 GPa, the friction coefficient decreases by the factor of 2 and wear resistance is enhanced by a factor of 10 after PI3. It is explained by the formation of a highly doped face-centered-cubic gamma-Fe(N,C) phase that is due to local tempering of the steel surface. The total concentration of nitrogen and carbon in this;phase is about 40 at. %. (C) 1999 American Vacuum Society. [S0734-211X(99)03102-9].
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页码：836 / 839
页数：4
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