Analysis and Design of Closed-Loop Detection Technique for Micro-Grating Accelerometer

被引:18
作者
Li, Hui [1 ]
Li, Shuokai [1 ]
Deng, Keke [1 ]
Gao, Shan [1 ]
Feng, Lishuang [1 ]
机构
[1] Beihang Univ, Sch Instrumentat Sci & Optoelect Engn, Beijing 100191, Peoples R China
基金
中国国家自然科学基金;
关键词
Closed-loop detection; control; micro-grating accelerometer; signal process; MODULATION; ACTUATION; SENSOR; NOISE;
D O I
10.1109/JLT.2018.2878097
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel closed-loop control method with Pound-Drever-Hall modulation technology is proposed to optimize the linearity and detection accuracy of micro-grating accelerometer in practical application. The closed-loop error is modulated to a high frequency for eliminating the direct current component of the interference intensity and stray light disturbance. After phase sensitive detector and filter of demodulation, the closed-loop error signal is obtained with high signal-to- noise ratio. Based on the principle of designed modulation and demodulation method, the dynamic model of closed-loop micro-grating accelerometer is established considering the nonlinear interference effect, optical intensity fluctuation, and unavoidable noise. Then, a robust control algorithm is designed to optimize the performance of micrograting accelerometer. The experimental results demonstrate that the micro-grating accelerometer has linearity within 0.35% and the bias stability 0.2 mg, which validate the effectiveness and usefulness of the proposed closed-loop detection scheme.
引用
收藏
页码:5738 / 5745
页数:8
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