Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator

被引：9
|
作者：
Fuchs, DT [1 ]
Chan, HB [1 ]
Stuart, HR [1 ]
Baumann, F [1 ]
Greywall, D [1 ]
Simon, ME [1 ]
Wong-Foy, A [1 ]
机构：
[1] Lucent Technol, Bell Labs, Murray Hill, NJ 07974 USA
来源：
ELECTRONICS LETTERS | 2004年 / 40卷 / 02期
关键词：
D O I：
10.1049/el:20040059
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A demonstration of how to monolithically combine silicon waveguides with MEMS-based phase shifters in a single SOI chip is presented. A folded Mach-Zehnder interferometer switch has been designed and tested. The phase shifters have negligible power consumption and a switching time of 150 mus.
引用
收藏
页码：142 / 143
页数：2
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