Micromechanical Force Sensor Using the Stress-Impedance Effect of Soft Magnetic FeCuNbSiB

被引：3
作者：
Froemel, Joerg [1 ,2 ]
Diguet, Gildas [1 ,2 ]
Muroyama, Masanori [1 ,3 ,4 ]
机构：
[1] Tohoku Univ, Org Adv Stud, Div Estab Frontier Sci, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan
[2] Tohoku Univ, Adv Inst Mat Res, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan
[3] Tohoku Univ, Grad Sch Engn, Dept Robot, Aoba Ku, 6-6-01 Aza Aoba, Sendai, Miyagi 9808579, Japan
[4] Fac Engn, Tohoku Inst Technol, Dept Elect & Elect Engn, Taihaku Ku, Yagiyama Kasumi Cho 35-1, Sendai, Miyagi 9828577, Japan
来源：
SENSORS | 2021年 / 21卷 / 22期
基金：
日本科学技术振兴机构;
关键词：
magnetic thin film; force sensing; stress-impedance effect; microdevice; GIANT MAGNETOIMPEDANCE; TACTILE SENSORS; SENSING SYSTEM; FILMS; ALLOYS; MAGNETOSTRICTION;
D O I：
10.3390/s21227578
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
By using the stress-impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mechanical properties were first investigated. The stress dependence of the magnetic permeability was shown to be caused by the used transducer effect. The sputtered thin film also exhibited a large yield strength of 983 GPa. Even though the fabrication technology for the device is very simple, characterization revealed a gauge factor (GF) of 756, which is several times larger than that achieved with conventional transducer effects, such as the piezoresistive effect. The fabricated device shows great application potential as a tactile sensor.
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页数：16
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