Antistatic study of SMIF systems

被引：0
|
作者：
Zhu, SB
机构：
来源：
INSTITUTE OF ENVIRONMENTAL SCIENCES, 1997 PROCEEDINGS - CONTAMINATION CONTROL | 1997年
关键词：
D O I：
暂无
中图分类号：
X [环境科学、安全科学];
学科分类号：
08 ; 0830 ;
摘要：
An optimal usage of IsoStat Ionizing Flow Bar may improve the antistatic performance of the Asyst 200 mm Load Port Transfer (LPT) system by orders of magnitude. The best mounting position for the flow bar is in close proximity of the air filter and the plastic door. With this configuration, it is possible to neutralize static charges on wafers in the LPT within 5 Seconds. In a combining usage of a grounded Asyst Gen-4 pod door and a static dissipative cassette, static charges can be eliminated in a duration of less than 0.1 Seconds even without an ionizer.
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页码：131 / 138
页数：8
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