Flexible lateral shearing interferometry based on polarization gratings for surface figure metrology

被引：6
|
作者：
Bin Jeong, Hyo [1 ]
Park, Hyo Mi [1 ]
Ghim, Young-Sik [2 ,3 ]
Joo, Ki-Nam [1 ]
机构：
[1] Chosun Univ, Dept Photon Engn, Gwangju 61452, South Korea
[2] Korea Res Inst Stand & Sci KRISS, Adv Instrumentat Inst, Opt Imaging & Metrol Team, Daejeon 34113, South Korea
[3] Univ Sci & Technol UST, Dept Sci Measurement, Daejeon 34113, South Korea
来源：
OPTICS AND LASERS IN ENGINEERING | 2022年 / 154卷
基金：
新加坡国家研究基金会;
关键词：
Lateral shearing interferometer; Polarization grating; Surface figure metrology; Wavefront; Polarization camera; Spatial phase shifting;
D O I：
10.1016/j.optlaseng.2022.107020
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A lateral shearing interferometer based on polarization gratings to measure surface figures is proposed and experimentally verified. The birefringent, polarizing beam splitting characteristics of polarization gratings make the optical configuration compact and flexible to adjust the lateral shear. The use of a polarization camera does not require sequential measurements, enabling single shot phase derivative characterization. In the experimental results, various specimens including freeform surfaces were measured with less than 100 nm deviations from the references.
引用
收藏
页数：7
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