SWIR InGaAs/GaAsSb type-II quantum well photodetectors and spectrometers integrated on SOI

被引:0
作者
Wang, Ruijun [1 ,2 ]
Muneeb, Muhammad [1 ,2 ]
Sprengel, Stephan [3 ]
Boehm, Gerhard [3 ]
Baets, Roel [1 ,2 ]
Amann, Markus-Christian [3 ]
Roelkens, Gunther [1 ,2 ]
机构
[1] Ghent Univ Imec, Photon Res Grp, Sint Pietersnieuwstr 41, B-9000 Ghent, Belgium
[2] Univ Ghent, Ctr Nano & Biophoton NB Photon, Ghent, Belgium
[3] Tech Univ Munich, Walter Schottky Inst, Coulombwall 4, D-85748 Garching, Germany
来源
SILICON PHOTONICS XI | 2016年 / 9752卷
关键词
silicon photonics; short-wave infrared; photodetectors; arrayed waveguide gratings; heterogeneous integration; 2; MU-M; SILICON; PHOTODIODES;
D O I
10.1117/12.2211802
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The short- wave infrared wavelength range (2-3 mu m) is attractive for applications in gas sensing and next-generation communication systems. Photodetectors and wavelength (de) multiplexers are key components that have to be developed for these systems. In this contribution, we report the integration of InGaAs/GaAsSb type-II quantum well photodetectors and spectrometers on the silicon photonics platform. In this photodetector epitaxial layer stack, the absorbing active region consists of 6 periods of W-shaped quantum wells, which can also be used to realize lasers. The efficient coupling between silicon waveguides and quantum well photodetectors is realized by tapered III-V waveguides. The photodetectors have a very low dark current of 12 nA at -0.5 V bias at room temperature. The devices show a responsivity of 1.2 A/W at 2.32 mu m wavelength, and higher than 0.5A/W over the 2.2-2.4 mu m wavelength range. On the silicon-on-insulator platform we also demonstrate high performance short- wave infrared spectrometers. 8-channel spectrometers in the 2.3-2.4 mu m range with a resolution of 5nm and 1.4nm are demonstrated, showing a cross-talk below -25 dB and an insertion loss lower than 3 dB.
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页数:8
相关论文
共 12 条
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