Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions

被引：9

作者：

Bae, Joohyeon ^{[1
,2
]}

Lee, Hyunsuk ^{[1
,2
]}

Seo, Duckhyeon ^{[1
,2
]}

Yun, Sangdu ^{[3
]}

Yang, Jeonghyeon ^{[3
]}

Huh, Sunchul ^{[1
,2
]}

Jeong, Hyomin ^{[1
,2
]}

Noh, Jungpil ^{[1
,2
]}

机构：

[1] Gyeongsang Natl Univ, Dept Energy & Mech Engn, 2 Tongyeonghaean Ro, Tongyeong 53064, South Korea

[2] Gyeongsang Natl Univ, Inst Marine Ind, 2 Tongyeonghaean Ro, Tongyeong 53064, South Korea

[3] Gyeongsang Natl Univ, Dept Mech Syst Engn, 2 Tongyeonghaean Ro, Tongyeong 53064, South Korea

来源：

MATERIALS | 2020年 / 13卷 / 14期

基金：

新加坡国家研究基金会;

关键词：

TiNi thin film; shape memory alloy; grain size; phase transformation behavior;

D O I：

10.3390/ma13143229

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature.

引用

页数：10

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