Characterization and modelling of 3D piezoelectric ceramic structures with ATILA software

被引:33
作者
Heinonen, E [1 ]
Juuti, J [1 ]
Leppävuori, S [1 ]
机构
[1] Univ Oulu, EMPART, Microelect & Mat Phys Labs, Res Grp Infotech Oulu, FIN-90570 Oulu, Finland
基金
芬兰科学院;
关键词
ATILA; actuators; PZT; piezoelectric properties;
D O I
10.1016/j.jeurceramsoc.2005.03.083
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this paper, the correspondence between ATILA-simutated and measured values of two piezoelectric ceramic structures, bulk and RAINBOW actuators, was determined. Modelling was started by creating a 2D wire model of the structures, after which a 3D model was created and simulation parameters were introduced (electric potentials, polarizations and boundary conditions). Harmonic type analysis was used in the simulations. The results obtained from the simulations contained information about displacements in the z-axis direction. Displacements of the measured structures behaved nonlinearly as a function of the electric field. Accordingly, effective piezoelectric coefficients (i.e. d(31), d(33)) calculated front the electric field and the displacement also changed nonlinearly. However, the displacement results acquired from simulations are linear, since the ATILA program uses a linear approach for in the calculation. This causes the modelling results to differ from the measurement results, especially when large voltages are used. The problem was solved by modifying the constant parameters used in the simulations. In-the study reported here, relative permittivity K(33), piezoelectric coefficient d33 and approximated piezoelectric coefficient d(31) were used to obtain more accurate modelling results corresponding to the measurement results. The differences in the z-axis displacements between the modelling (using the original material parameters) and measurement results obtained with bulk and RAINBOW actuators were 6.5-17.7% and 6.0-27.9%, respectively. With modified material parameters, the differences were 1.1-1.6% and 3.1-8.5%, respectively. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2467 / 2470
页数:4
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