Nanocrystalline α-Al2O3 Coatings Obtained by Reactive Thermal Anodic Evaporation in Arc Discharge at Low Temperature

被引：5

作者：

Gavrilov, N. V. ^{[1
]}

Kamenetskikh, A. S. ^{[1
]}

Tretnikov, P. V. ^{[1
]}

Chukin, A. V. ^{[2
]}

机构：

[1] Russian Acad Sci, Ural Branch, Inst Electrophys, Ekaterinburg 620216, Russia

[2] Ural Fed Univ, Ekaterinburg 620002, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2017年 / 43卷 / 10期

基金：

俄罗斯基础研究基金会;

关键词：

DEPOSITION; MICROSTRUCTURE; CATHODE;

D O I：

10.1134/S1063785017100200

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Al2O3 nanocrystalline coatings are obtained for the first time by anodic thermal evaporation of aluminum in an arc discharge in an oxygen-argon mixture at a temperature of 600 degrees C on stainless-steel substrates with a Cr2O3 sublayer. The effect of the surface state of the samples and ion energy on the phase composition, microstructure, and properties of the coating is assessed. The alpha-Al2O3 phase is formed in the range of the bias potential of 25-200 V, with the growth of which the microcrystallite size decreases from 60 to 15 nm and the hardness of the coating increases from 8 to 20 GPa.

引用

页码：951 / 954

页数：4

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