Synthesis and characterization of novel fluorinated polycarbonate negative-type photoresist for optical waveguide

被引：20

作者：

Cai, Zhenzhen ^{[1
]}

Yu, Huanyang ^{[2
]}

Zhang, Yingchao ^{[1
]}

Li, Ming ^{[1
]}

Niu, Xiaoyan ^{[4
]}

Shi, Zuosen ^{[1
]}

Cui, Zhanchen ^{[1
,3
]}

Chen, Changming ^{[4
]}

Zhang, Daming ^{[4
]}

机构：

[1] Jilin Univ, State Key Lab Supramol Struct & Mat, Changchun 130012, Peoples R China

[2] Jilin Jianzhu Univ, Coll Mat Sci & Engn, Changchun 130118, Peoples R China

[3] Jilin Univ, Zhuhai Coll, Dept Chem & Pharm, Zhuhai 519041, Peoples R China

[4] Jilin Univ Reg, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China

来源：

POLYMER | 2015年 / 61卷

基金：

中国国家自然科学基金;

关键词：

Polycarbonate; Photoresist; Optical waveguide; ETHER KETONE; POLYMER; ROUGHNESS;

D O I：

10.1016/j.polymer.2015.01.074

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

A kind of fluorinated and epoxy-terminated low-molecular-weight bisphenol A polycarbonate (FBPA-PC EP) was synthesized by solution polymerization of 4, 4'-(hexafluoro-isopropylidene) diphenol (6F-BPA) with triphosgene (BTC) and further reacted with epoxy chloropropane. The structure of the polymer was confirmed by FTIR, H-1 NMR, C-13 NMR and F-19 NMR spectra. A series of negative-type fluorinated photoresists (NTFPs) were prepared by mixing of FBPA-PC EP and FSU-8 with triphenylsulfonium hexafluorophosphate and cyclopentanone as the photoacid generator (PAG) and solvent. The polymer films prepared from NTFPs by UV-curing exhibited superior chemical resistance, excellent thermal stability (Tds ranged from 295 to 303 degrees C) and low surface roughness. A clear negative pattern was obtained through direct UV photo-cross-linking and then chemical development which can be used as high-quality channel waveguides (the roughness of the lateral ridge ranged from 21 to 32 nm (1 x 1 mu m)). For waveguides with the polymethylmethacrylate as upper cladding, the propagation loss of the channel waveguides was measured to be 0.25 dB/cm at the monitoring light of 1550 nm. (C) 2015 Elsevier Ltd. All rights reserved.

引用

页码：140 / 146

页数：7

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