Analysis of resist pattern collapse and optimization of DUV process for patterning sub-0.20μm gate line

被引：14

作者：

Yu, JY ^{[1
]}

Jeong, GM ^{[1
]}

Huh, H ^{[1
]}

Kim, JJ ^{[1
]}

Kim, SP ^{[1
]}

Jeong, JK ^{[1
]}

Kim, HS ^{[1
]}

机构：

[1] LG Semicon Co Ltd, R&D Div, Chungbuk 360480, South Korea

来源：

ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XV, PTS 1 AND 2 | 1998年 / 3333卷

关键词：

pattern collapse; reflection control; defect inspection; nitride films;

D O I：

10.1117/12.312455

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We analyzed the local pattern collapse by KLA-2132 in patterning gate line of 0.18 mu m on the Poly-Si/WSis/Si3N4, where the thickness variation of Si3N4 (Nitride) film affected on the substrate reflectivity. By thickness split experiments of organic bottom anti-reflective layers(ARLs), we showed the effect of thickness variation of Nitride on the resist pattern collapse. We investigated the contribution of various factors to the pattern collapse. First of all, we focused on the CD variation due to substrate reflectivity variation to remove patterns of tolerable aspect ratio. In order to obtain better CD uniformity by tight reflectivity control considering the thickness variation of Nitride film. we optimized anti-reflective layer process using inorganic ARLs. As an inorganic ARL. we used PECVD SiOsNy:H(SiON) of which optical constants were changed by deposition conditions. We compared typical positive-tone DUV resists, of acetal based with environmentally stable chemically amplified photoresist(ESCAP) type. to clarify the effect of resist and organic bottom ARL materials.

引用

页码：880 / 889

页数：4