Soft metrology based on machine learning: a review

被引:35
作者
Vallejo, Marcela [1 ]
de la Espriella, Carolina [2 ]
Gomez-Santamaria, Juliana [2 ]
Felipe Ramirez-Barrera, Andres [2 ]
Delgado-Trejos, Edilson [2 ]
机构
[1] Inst Tecnol Metropolitan, Dept Elect & Telecommun, Medellin, Colombia
[2] Inst Tecnol Metropolitan, AMYSOD Lab, Parque I, Medellin, Colombia
关键词
soft metrology; soft sensor; virtual sensor; virtual metrology; machine learning; uncertainty analysis; PARTIAL LEAST-SQUARES; VOLTAMMETRIC ELECTRONIC TONGUE; SUPPORT VECTOR REGRESSION; VIRTUAL METROLOGY; INFERENTIAL CONTROL; QUALITY PREDICTION; VARIABLE SELECTION; SENSOR; UNCERTAINTY; CLASSIFICATION;
D O I
10.1088/1361-6501/ab4b39
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Soft metrology has been defined as a set of measurement techniques and models that allow the objective quantification of properties usually determined by human perception such as smell, sound or taste. The development of a soft metrology system requires the measurement of physical parameters and the construction of a model to correlate them with the variables that need to be quantified. This paper presents a review of indirect measurement with the aim of understanding the state of development in this area, as well as the current challenges and opportunities; and proposes to gather all the different designations under the term soft metrology, broadening its definition. For this purpose, the literature on indirect measurement techniques and systems has been reviewed, encompassing recent as well as a few older key documents to present a time line of development and map out application contexts and designations. As machine learning techniques have been extensively used in indirect measurement strategies, this review highlights them, and also makes an effort to describe the state of the art regarding the determination of uncertainty. This study does not delve into developments and applications for human and social sciences, although the proposed definition considers the use that this term has had in these areas.
引用
收藏
页数:16
相关论文
共 131 条
[71]   Virtual Metrology for Plasma Etch using Tool Variables [J].
Lynn, Shane ;
Ringwood, John ;
Ragnoli, Emanuele ;
McLoone, Sean ;
MacGearailt, Niall .
2009 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, 2009, :143-+
[72]   Global and Local Virtual Metrology Models for a Plasma Etch Process [J].
Lynn, Shane A. ;
Ringwood, John ;
MacGearailt, Niall .
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2012, 25 (01) :94-103
[73]   A Computer Vision-Inspired Deep Learning Architecture for Virtual Metrology Modeling With 2-Dimensional Datale [J].
Maggipinto, Marco ;
Terzi, Matteo ;
Masiero, Chiara ;
Beghi, Alessandro ;
Susto, Gian Antonio .
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2018, 31 (03) :376-384
[74]   Predicting the botanical and geographical origin of honey with multivariate data analysis and machine learning techniques: A review [J].
Maione, Camila ;
Barbosa, Fernando, Jr. ;
Barbosa, Rommel Melgaco .
COMPUTERS AND ELECTRONICS IN AGRICULTURE, 2019, 157 :436-446
[75]   Mini-review: soft sensors as means for PAT in the manufacture of bio-therapeutics [J].
Mandenius, Carl-Fredrik ;
Gustavsson, Robert .
JOURNAL OF CHEMICAL TECHNOLOGY AND BIOTECHNOLOGY, 2015, 90 (02) :215-227
[76]   Measurement in soft systems: Epistemological framework and a case study [J].
Mari, Luca ;
Lazzarotti, Valentina ;
Manzini, Raffaella .
MEASUREMENT, 2009, 42 (02) :241-253
[77]   CONTEMPLATIVE STANCE FOR CHEMICAL PROCESS-CONTROL - AN IFAC REPORT [J].
MCAVOY, TJ .
AUTOMATICA, 1992, 28 (02) :441-442
[78]   Data-driven soft sensor modeling based on twin support vector regression for cane sugar crystallization [J].
Meng, Yanmei ;
Lan, Qiliang ;
Qin, Johnny ;
Yu, Shuangshuang ;
Pang, Haifeng ;
Zheng, Kangyuan .
JOURNAL OF FOOD ENGINEERING, 2019, 241 :159-165
[79]   NON-LINEAR INFERENTIAL CONTROL [J].
MORARI, M ;
FUNG, AKW .
COMPUTERS & CHEMICAL ENGINEERING, 1982, 6 (04) :271-281
[80]   Nonparametric Bayesian methods [J].
Mueller, Peter ;
Quintana, Fernando A. .
STATISTICAL MODELLING, 2008, 8 (01) :1-2