Growth of bulk GaN crystal by Na flux method under various conditions

被引:72
作者
Mori, Y. [1 ]
Imade, M. [1 ]
Murakami, K. [1 ]
Takazawa, H. [1 ]
Imabayashi, H. [1 ]
Todoroki, Y. [1 ]
Kitamoto, K. [1 ]
Maruyama, M. [1 ]
Yoshimura, M. [1 ]
Kitaoka, Y. [1 ]
Sasaki, T. [1 ]
机构
[1] Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
关键词
A1. Na flux method; A2. GaN bulk crystal; LIQUID-PHASE EPITAXY; SINGLE-CRYSTALS; NITROGEN DISSOLUTION; SEEDED GROWTH; PRESSURE; DISLOCATIONS; TRANSPARENT; ADDITIVES; FILM; MELT;
D O I
10.1016/j.jcrysgro.2011.12.026
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
High-quality and low cost bulk crystals are needed in the field of group III nitride semiconductors in order to develop optical and electrical devices. There are two approaches for the growth of bulk GaN crystal by the Na flux method. One is to grow thick GaN crystal on a large seed GaN crystal grown by vapor phase method. The other is to grow GaN crystal on a small seed GaN crystal. 3 in diameter GaN crystals were grown on the large GaN seed crystal. In the case of the growth on a small GaN seed, we obtained bulk crystal with a pyramidal shape and its height and diameter were 15 mm and > 20 mm, respectively. We also present the effects of the impurity in the solution on the property and growth habit. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:72 / 74
页数:3
相关论文
共 31 条
[1]   High pressure-high temperature seeded growth of GaN on 1 in sapphire/GaN templates: Analysis of convective transport [J].
Bockowski, M. ;
Strak, P. ;
Kempisty, P. ;
Grzegory, I. ;
Krukowski, S. ;
Lucznik, B. ;
Porowski, S. .
JOURNAL OF CRYSTAL GROWTH, 2007, 307 (02) :259-267
[2]  
Bohyama S, 2002, PHYS STATUS SOLIDI A, V194, P528, DOI 10.1002/1521-396X(200212)194:2<528::AID-PSSA528>3.0.CO
[3]  
2-7
[4]   Bulk ammonothermal GaN [J].
Dwilinski, R. ;
Doradzinski, R. ;
Garczynski, J. ;
Sierzputowski, L. P. ;
Puchalski, A. ;
Kanbara, Y. ;
Yagi, K. ;
Minakuchi, H. ;
Hayashi, H. .
JOURNAL OF CRYSTAL GROWTH, 2009, 311 (10) :3015-3018
[5]   Effect of thermal convection on liquid phase epitaxy of GaN by Na flux methodn [J].
Gejo, Ryohei ;
Kawamura, Furnio ;
Kawahara, Minoru ;
Yoshimura, Masashi ;
Kitaoka, Yasuo ;
Mori, Yusuke ;
Sasaki, Takatomo .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (12) :7689-7692
[6]   A GaN bulk crystal with improved structural quality grown by the ammonothermal method [J].
Hashimoto, Tadao ;
Wu, Feng ;
Speck, James S. ;
Nakamura, Shuji .
NATURE MATERIALS, 2007, 6 (08) :568-571
[7]   Growth of Large GaN Single Crystals on High-Quality GaN Seed by Carbon-Added Na Flux Method [J].
Imade, Mamoru ;
Hirabayashi, Yasuhiro ;
Konishi, Yusuke ;
Ukegawa, Hiroshi ;
Miyoshi, Naoya ;
Yoshimura, Masashi ;
Sasaki, Takatomo ;
Kitaoka, Yasuo ;
Mori, Yusuke .
APPLIED PHYSICS EXPRESS, 2010, 3 (07)
[8]   Effects of ammonia gas on threshold pressure and seed growth for bulk GaN single crystals by Na flux method [J].
Iwahashi, T ;
Kawamura, F ;
Morishita, M ;
Kai, Y ;
Yoshimura, M ;
Mori, Y ;
Sasaki, T .
JOURNAL OF CRYSTAL GROWTH, 2003, 253 (1-4) :1-5
[9]   EQUILIBRIUM PRESSURE OF N-2 OVER GAN AND HIGH-PRESSURE SOLUTION GROWTH OF GAN [J].
KARPINSKI, J ;
JUN, J ;
POROWSKI, S .
JOURNAL OF CRYSTAL GROWTH, 1984, 66 (01) :1-10
[10]   Global analysis of GaN growth using a solution technique [J].
Kashiwagi, D. ;
Gejo, R. ;
Kangawa, Y. ;
Liu, L. ;
Kawamura, F. ;
Mori, Y. ;
Sasaki, T. ;
Kakimoto, K. .
JOURNAL OF CRYSTAL GROWTH, 2008, 310 (7-9) :1790-1793