EFFICIENCY OF POLYURETHANE POLISHERS DURING THE OPTICAL GLASS POLISHING

被引：1

作者：

Belkhir, Nabil ^{[1
]}

Bouzid, Djamel

Herold, Volker ^{[2
]}

机构：

[1] Univ Ferhat Abass Setif, IOMP, Inst Opt & Precis Mech, Appl Opt Lab, Setif 19000, Algeria

[2] Univ Jena, Inst Mat Sci & Technol, D-6900 Jena, Germany

来源：

ANNALES DE CHIMIE-SCIENCE DES MATERIAUX | 2012年 / 37卷 / 01期

关键词：

CMP; SLURRY; PAD; OPTIMIZATION; DEFECTS; SIZE;

D O I：

10.3166/acsm.37.31-48

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The subject of this work is to study the efficiency of the polyurethane polishing pad relatively to its quality during the free abrasive polishing process of the optical glass. In this work, samples of BK7 optical glass were polished. Three kinds of polyurethane polishers were used. The glass surface and the polishers were characterized using several characterization techniques. The obtained results show that the polishing pad quality influences the polishing efficiency and the glass surface quality. The polyurethane polishers undergo wear during their use more than one hour in the glass polishing process, where some changes of the polisher characteristics were observed.

引用

页码：31 / 48

页数：18

共 23 条

[1] Ali I, 1997, SOLID STATE TECHNOL, V40, P185
[2] Evaluation of mechanic characteristics of the polyurethane polisher used as an abrasive door during the process of polishing optic glass
Aliouane, T
Bouzid, D
Belkhir, N
Bouzid, S
Herold, V
[J]. JOURNAL DE PHYSIQUE IV, 2005, 124 : 123 - 128
[3] BAJAJ R, 1994, MATER RES SOC SYMP P, V337, P637, DOI 10.1557/PROC-337-637
[4] Effect of particle size of chemical mechanical polishing slurries for enhanced polishing with minimal defects
Basim, GB
Adler, JJ
Mahajan, U
Singh, RK
Moudgil, BM
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (09) : 3523 - 3528
[5] Beilby G. T., 1904, P ROY SOC, V72, P218
[6] Wear behavior of the abrasive grains used in optical glass polishing
Belkhir, N.
Bouzid, D.
Herold, V.
[J]. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2009, 209 (20) : 6140 - 6145
[7] Determination of the Friction Coefficient During Glass Polishing
Belkhir, N.
Bouzid, D.
Herold, V.
[J]. TRIBOLOGY LETTERS, 2009, 33 (01) : 55 - 61
[8] Bouzid D, 1997, GLASS TECHNOL, V38, P18
[9] Dornfeld D., 2008, Precision Manufacturing
[10] Pad conditioning in chemical mechanical polishing
Hooper, BJ
Byrne, G
Galligan, S
[J]. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2002, 123 (01) : 107 - 113

← 1 2 3 →