Optical and Electrical Properties of Flexible SnO2/Ag/SnO2 Multilayer Thin Films on Polyethylene Terephthalate Substrate

被引：10

作者：

Kim, Tae-Keun ^{[1
]}

Jang, Gun-Eik ^{[1
]}

机构：

[1] Chungbuk Natl Univ, Dept Mat Engn, Cheongju 28644, South Korea

来源：

JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | 2017年 / 12卷 / 09期

关键词：

TCO; OMO Structure; EMP; Transmittance; Figure of Merit; TRANSPARENT CONDUCTORS; HIGH FIGURE; MERIT; ELECTRODES; LAYER;

D O I：

10.1166/jno.2017.2153

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

SnO2/Ag/SnO2 multilayer films were prepared on PET substrate by sequential use of RF/DC magnetron sputtering at room temperature. The influence of SnO2 layer thickness on the optical and electrical properties of the multilayer films on PET substrate was investigated. EMP simulation results of SnO2/Ag/SnO2 multilayer films on PET show transmittances over 87.7 similar to 89.6% at 550 nm, whereas experimentally measured results show exhibit transmittances over 78.8 similar to 85.6% at 550 nm. As the SnO2 layer thickness increased from 20 to 35 nm, the sheet resistance (R-s) increased from 8.68 to 10.06 Omega/sq. The Haacke's figure of merit (FOM) was calculated for the samples with various SnO2 layer thicknesses, and was a maximum at 30 nm (21.32x10(-3) Omega(-1)).

引用

页码：881 / 885

页数：5

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