Highly accurate SNR measurement using the covariance of two SEM images with the identical view

Quality of an SEM image is strongly influenced by the extent of noise. As a well-known method in the field of SEM, the covariance is applied to measure the signal-to-noise ratio (SNR). This method has potential ability for highly accurate measurement of the SNR, which is hardly known until now. If the precautions discussed in this article are adopted, that method can demonstrate its real ability. These precautions are strongly related to proper acquisition of two images with the identical view, alignment of an aperture diaphragm, reduction of charging phenomena, elimination of particular noises, and accurate focusing, As necessary, characteristics in SEM signal and noise are investigated from a few standpoints. When using the maximum performance of this measurement, SNR of many SEM images obtained in a variety of the SEM operating conditions and specimens can be measured accurately. SCANNING 34: 4350, 2012. (c) 2011 Wiley Periodicals, Inc.