Improved Performance of Integrated Solenoid Fluxgate Sensor Chip Using a Bilayer Co-Based Ribbon Core

被引：18

作者：

Lei, Chong ^{[1
]}

Liu, Yan ^{[1
]}

Sun, Xue-Cheng ^{[1
]}

Wang, Tao ^{[1
]}

Yang, Zhen ^{[1
]}

Zhou, Yong ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Dept Micro Nano Elect, Key Lab Thin Film & Microfabricat,Minist Educ, Shanghai 200240, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2015年 / 15卷 / 09期

基金：

中国国家自然科学基金; 上海市自然科学基金;

关键词：

Fluxgate sensor; MEMS; amorphous ribbon; bi-layer core; ORTHOGONAL FLUXGATE; MAGNETIC SENSOR; LOW-NOISE; MAGNETOMETER; SENSITIVITY; READOUT;

D O I：

10.1109/JSEN.2015.2432457

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, based on the multiwire core design and microelectromechanical system technology, we report improved performance of a microsolenoid fluxgate sensor by integrating a bilayer core of co-based amorphous ribbon. By means of utilizing integrated multilayer core structure and high permeability amorphous ribbon core material, this paper shows how a high-performance microfluxgate chip with small dimensions can be realized. The fabricated sensors exhibit a best sensitivity of 3165 V/T, a power of 183.2 mW and a linear range of 150 mu T at 100 kHz. The noise power density is found to be 0.5 nT/Hz(1/2) 1 Hz and the noise rms level is 2 nT in the frequency range of 25 mHz-10 Hz.

引用

页码：5010 / 5014

页数：5

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