Highly transparent ZnO bilayers by LP-MOCVD as front electrodes for thin-film micromorph silicon solar cells

被引：37

作者：

Ding, L. ^{[1
]}

Boccard, M. ^{[1
]}

Bugnon, G. ^{[1
]}

Benkhaira, M. ^{[1
]}

Nicolay, S. ^{[1
]}

Despeisse, M. ^{[1
]}

Meillaud, F. ^{[1
]}

Ballif, C. ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Inst Microengn IMT, Photovolta & Thin Film Elect Lab, CH-2000 Neuchatel, Switzerland

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2012年 / 98卷

关键词：

Zinc oxide; LP-MOCVD; FCA; Bilayer; Micromorph; Thin-film solar cell; CHEMICAL-VAPOR-DEPOSITION; ELECTRICAL-PROPERTIES; LAYERS; SI; OXIDES; TCO;

D O I：

10.1016/j.solmat.2011.11.033

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

ZnO bilayer films were deposited by a low-pressure metalorganic chemical vapor deposition technique in a single process step, by doping with boron only the nucleation stage of the growth. The resulting 2 pm thick layers are characterized by low free carrier absorption and electron mobilities over 40 cm(2)/Vs. They therefore combine high transparency in the infrared region and moderate sheet resistances of 30 Omega/sq. It is thought that the controlled introduction of boron in the early nucleation stage enables its diffusion through the layer, resulting in a very efficient reduction of the sheet resistance compared to samples deposited without doping, while preserving a strong light-scattering interface. These properties make ZnO bilayers ideal electrodes for the development of micromorph thin-film solar cells with enhanced photogenerated current. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：331 / 336

页数：6

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