Design, Simulation and Technological Realization of Polymer Based 3D 1x4 Splitter

被引:4
作者
Gajdosova, Lenka [1 ]
Seyringer, Dana [1 ]
Gaso, Peter [2 ]
Jandura, Daniel [2 ]
Pudis, Dusan [2 ]
机构
[1] Vorarlberg Univ Appl Sci, Res Ctr Microtechnol, Hochschulstr 1, A-6850 Dornbirn, Austria
[2] Univ Zilina, Fac Elect Engn, Univ 8215-1, Zilina 01026, Slovakia
来源
APPLIED PHYSICS OF CONDENSED MATTER (APCOM 2019) | 2019年 / 2131卷
关键词
D O I
10.1063/1.5119465
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We demonstrate possibilities of three-dimensional printing technology based on two-photon polymerization applying polymer polydimethylsiloxane (PDMS). This silicone compound is meant for fabrication of photonic integrated circuits using 3D dip-in direct laser writing (DLW). First, a 3D Y-branch splitter was designed for TM-polarized light, working in the telecom operating wavelength region of 1550 nm. For the splitter design, a channel type 3D waveguide structure was applied. The simulations were performed in BeamPROP simulation engine of RSoft photonic tool. The splitter was optimized according to the optical properties and the manufacturable dimensions of the structure. Consequently, based on the design results, the 3D Y-branch splitter was fabricated using the 3D dip-in DLW optical lithography.
引用
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页数:4
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