X-ray photoelectron spectroscopy analysis of ion beam sputter deposited calcium phosphate coating

X-ray photoelectron spectroscopy was used to analyze the ion beam sputter deposited calcium phosphate coating. Pure titanium plates of the size 20mm × 20mm × 1mm were used as the substrtate. They were polished and ultrasonically cleaned with acetone. Hydroxyapatite (HA) powder was synthesized using the wet method. HA powder disks used to analyze the ion beam sputtering target were cold pressed and sintered at 1150° C for 3 h. It was found that ion beam sputter deposition system mainly consisted of one Kaufman ion source and one Freeman ion source.