Estimation of steady-state leakage current in polycrystalline PZT thin films

被引:11
作者
Podgorny, Yury [1 ]
Vorotilov, Konstantin [1 ]
Sigov, Alexander [1 ]
机构
[1] Moscow Technol Univ MIREA, Vernadsky Pr 78, Moscow 119454, Russia
基金
俄罗斯基础研究基金会;
关键词
FERROELECTRIC-FILMS; RELAXATION; ELECTRODES; PRECURSORS; TITANATE; LEAD;
D O I
10.1063/1.4964147
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Estimation of the steady state (or "true") leakage current J(s) in polycrystalline ferroelectric PZT films with the use of the voltage-step technique is discussed. Curie-von Schweidler (CvS) and sum of exponents (Sigma exp) models are studied for current-time J (t) data fitting. Sigma exp model (sum of three or two exponents) gives better fitting characteristics and provides good accuracy of J(s) estimation at reduced measurement time thus making possible to avoid film degradation, whereas CvS model is very sensitive to both start and finish time points and give in many cases incorrect results. The results give rise to suggest an existence of low-frequency relaxation processes in PZT films with characteristic duration of tens and hundreds of seconds. (C) 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
引用
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页数:5
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