A review of thin-film resonator technology

被引：74

作者：

Lakin, KM ^{[1
]}

机构：

[1] TFR Technol Inc, Bend, OR USA

来源：

IEEE MICROWAVE MAGAZINE | 2003年 / 4卷 / 04期

关键词：

Equivalent circuits - Microelectronics - Thin film circuits - Thin films - Bandpass filters - Piezoelectric materials - Resonators - Timing circuits - Acoustic waves - Piezoelectricity - Resonant circuits;

D O I：

10.1109/MMW.2003.1266067

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thin-film resonator technology is under development for over 40 years as a means to reach higher frequencies than obtainable wih conventional quartz-crystal technology. Efforts to reach the high frequencies demanded by bandwidth-hungry evolving systems has caused a rapid development of filter technology. This paper presents a review of the thin-film resonator (TFR) technology that describes the core structures and issues and gives examples of filters and resonators that are manufactured or demonstrated.

引用

页码：61 / 67

页数：7