Foundry technology for the next decade

被引：7

作者：

Sun, JYC ^{[1
]}

Chiang, SY ^{[1
]}

Liu, M ^{[1
]}

机构：

[1] Taiwan Semicond Mfg Co, Hsinchu, Taiwan

来源：

INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST | 1998年

关键词：

D O I：

10.1109/IEDM.1998.746364

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Foundry technology has emerged from OEM to standard generic process in the past 10 years, and now to the leading edge for the next decade. This paper gives an overview of the present and future foundry technologies which are the foundation of the virtual fab for fabless, integrated device manufacturer (IDM), and system companies.

引用

页码：321 / 324

页数：4