共 14 条
[5]
Paros J M., 1965, Mach. Des, V37, P151
[6]
Peterson R.E., 1974, STRESS CONCENTRATION, Vfirst
[7]
Ragulskis KM, 1989, VIBRATION ENG, V3, P447
[8]
Optimal design of a flexure hinge based XYθ wafer stage
[J].
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING,
1997, 21 (01)
:18-28
[9]
Error analysis of a flexure hinge mechanism induced by machining imperfection
[J].
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING,
1997, 21 (2-3)
:83-89