Temperature-compensated shear-horizontal surface acoustic waves in layered quartz/SiO2-Structures

被引:0
|
作者
Herrmann, F
Büttgenbach, S
机构
[1] Robert Bosch GmbH, Dept FV FLD, D-70049 Stuttgart, Germany
[2] Tech Univ Braunschweig, Inst Microtechnol, D-38106 Braunschweig, Germany
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1998年 / 170卷 / 02期
关键词
D O I
10.1002/(SICI)1521-396X(199812)170:2<R3::AID-PSSA99993>3.0.CO;2-U
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:R3 / R4
页数:2
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