Temperature-compensated shear-horizontal surface acoustic waves in layered quartz/SiO2-Structures

被引：1
作者：
Herrmann, F
Büttgenbach, S
机构：
[1] Robert Bosch GmbH, Dept FV FLD, D-70049 Stuttgart, Germany
[2] Tech Univ Braunschweig, Inst Microtechnol, D-38106 Braunschweig, Germany
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1998年 / 170卷 / 02期
关键词：
D O I：
10.1002/(SICI)1521-396X(199812)170:2<R3::AID-PSSA99993>3.0.CO;2-U
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
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页码：R3 / R4
页数：2
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