An out-of-plane electro-thermal polymer actuator

被引：0

作者：

Zhang, Dan ^{[1
]}

Ding, Guifu ^{[1
]}

Zhu, Lida ^{[1
]}

Cheng, Jifeng ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Natl Key Lab Nano Micro Fabricat Technol, Key Lab Thin Film & Microfabricat Technol, Minist Educ,Res Inst Micro Nanomter Sci & Technol, Shanghai 200030, Peoples R China

来源：

2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2008年

关键词：

out-of-plane actuator; FEM; polymer actuator;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

an out-of-plane micro thermal polymer actuator, which is designed with the bimorph effect, is presented. This actuator has a bi-layer structure, which consists of SU-8 photoresist encapsulating meandering nickel heater and passive Ni top layer. The actuator has a symmetric configuration. This paper demonstrates its design, simulation, fabrication and device tests. This actuator bends vertically when energized. With a size of 0.38mm x 0.23mm, it demonstrated a maximal vertical displacement of 24 mu m at 1.4V driving voltage and at 20mW input power, at an average temperature of 95 degrees C. The stiffness of the actuator is of 36 N/m along perpendicular direction, and it can generate a vertical force of 0.98mN in this direction.

引用

页码：647 / 650

页数：4