High temperature measurements of metal contacts on epitaxial graphene

被引:33
作者
Nagareddy, V. K. [1 ]
Nikitina, I. P. [1 ]
Gaskill, D. K. [2 ]
Tedesco, J. L. [2 ]
Myers-Ward, R. L. [2 ]
Eddy, C. R. [2 ]
Goss, J. P. [1 ]
Wright, N. G. [1 ]
Horsfall, A. B. [1 ]
机构
[1] Newcastle Univ, Sch Elect Elect & Comp Engn, Newcastle Upon Tyne NE1 7RU, Tyne & Wear, England
[2] USN, Res Lab, Washington, DC 20375 USA
基金
英国工程与自然科学研究理事会;
关键词
RAMAN-SPECTROSCOPY; INTERFACE; SURFACES;
D O I
10.1063/1.3627167
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electrical characteristics of Cr/Au and Ti/Au metal contacts on epitaxial graphene on 4H-SiC showed significant variations in resistance parameters at 300 K. These parameters decreased substantially as the temperature increased to 673 K. The work function, binding energy, and diffusion energy of the deposited metals were used to explain these observed variations. The quantitative analysis of our data demonstrates that non-reactive metals with higher work functions result in lower contact resistance, which can be further decreased by 70% using appropriate annealing. These results provide important information when considering epitaxial graphene for high temperature applications. (C) 2011 American Institute of Physics. [doi:10.1063/1.3627167]
引用
收藏
页数:3
相关论文
共 23 条
[1]   Graphene: Electronic and Photonic Properties and Devices [J].
Avouris, Phaedon .
NANO LETTERS, 2010, 10 (11) :4285-4294
[2]   Interface Properties of Metal/Graphene Heterostructures Studied by Micro-Raman Spectroscopy [J].
Entani, Shiro ;
Sakai, Seiji ;
Matsumoto, Yoshihiro ;
Naramoto, Hiroshi ;
Hao, Ting ;
Maeda, Yoshihito .
JOURNAL OF PHYSICAL CHEMISTRY C, 2010, 114 (47) :20042-20048
[3]   Epitaxial Graphene Growth on SiC Wafers [J].
Gaskill, D. K. ;
Jernigan, G. G. ;
Campbell, P. M. ;
Tedesco, J. L. ;
Culbertson, J. C. ;
VanMill, B. L. ;
Myers-Ward, R. L. ;
Eddy, C. R., Jr. ;
Moon, J. ;
Curtis, D. ;
Hu, M. ;
Wong, D. ;
McGuire, C. ;
Robinson, J. A. ;
Fanton, M. A. ;
Stitt, J. P. ;
Stitt, T. ;
Snyder, D. ;
Wang, X. ;
Frantz, E. .
GRAPHENE AND EMERGING MATERIALS FOR POST-CMOS APPLICATIONS, 2009, 19 (05) :117-+
[4]   Graphene: Status and Prospects [J].
Geim, A. K. .
SCIENCE, 2009, 324 (5934) :1530-1534
[5]   Atomic Hole Doping of Graphene [J].
Gierz, Isabella ;
Riedl, Christian ;
Starke, Ulrich ;
Ast, Christian R. ;
Kern, Klaus .
NANO LETTERS, 2008, 8 (12) :4603-4607
[6]   Doping graphene with metal contacts [J].
Giovannetti, G. ;
Khomyakov, P. A. ;
Brocks, G. ;
Karpan, V. M. ;
van den Brink, J. ;
Kelly, P. J. .
PHYSICAL REVIEW LETTERS, 2008, 101 (02)
[7]   Spatially resolved raman spectroscopy of single- and few-layer graphene [J].
Graf, D. ;
Molitor, F. ;
Ensslin, K. ;
Stampfer, C. ;
Jungen, A. ;
Hierold, C. ;
Wirtz, L. .
NANO LETTERS, 2007, 7 (02) :238-242
[8]   Fabrication of single-phase titanium carbide layers from MWCNTs using high DC pulse [J].
Kim, Woo Sik ;
Moon, Sook Young ;
Lee, Jeong Hoon ;
Bang, Sin Young ;
Choi, Bong Geun ;
Ham, Heon ;
Sekino, Tohru ;
Shim, Kwang Bo .
NANOTECHNOLOGY, 2010, 21 (05)
[9]   Graphene on gold: Electron density of states studies by scanning tunneling spectroscopy [J].
Klusek, Z. ;
Dabrowski, P. ;
Kowalczyk, P. ;
Kozlowski, W. ;
Olejniczak, W. ;
Blake, P. ;
Szybowicz, M. ;
Runka, T. .
APPLIED PHYSICS LETTERS, 2009, 95 (11)
[10]   Contact resistivity and current flow path at metal/graphene contact [J].
Nagashio, K. ;
Nishimura, T. ;
Kita, K. ;
Toriumi, A. .
APPLIED PHYSICS LETTERS, 2010, 97 (14)