Low-loss micromachined inverted overlay CPW lines with wide impedance ranges and inherent airbridge connection capability

被引：24

作者：

Kwon, Y ^{[1
]}

Kim, HT ^{[1
]}

Park, JH ^{[1
]}

Kim, YK ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Elect Engn, Ctr 3D Millimeter Wave Integrated Syst, Seoul 151742, South Korea

来源：

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS | 2001年 / 11卷 / 02期

关键词：

coplanar waveguide; micromachining technology; transmission line;

D O I：

10.1109/7260.914302

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new type of overlay coplanar waveguide (CPW) structure, "inverted overlay CPW (IOCPW)" is developed using micromachining techniques to provide easy means of airbridge connection between the ground planes, as well as to achieve lour losses over wide impedance ranges. Measured IOCPW showed less than 1 dB/cm loss at 50 GHz over a wide impedance range from 25 to 80 Omega. It also offered low effective dielectric constant, and insensitivity to the substrate losses. Wide impedance ranges and simple process steps make IOCPW a promising uniplanar transmission line medium for mm-wave monolithic applications.

引用

页码：59 / 61

页数：3

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