Dual-Cavity Fabry-Perot Interferometric Sensors for the Simultaneous Measurement of High Temperature and High Pressure

被引：53

作者：

Gao, Hongchun ^{[1
]}

Jiang, Yi ^{[1
]}

Cui, Yang ^{[1
]}

Zhang, Liuchao ^{[1
]}

Jia, Jingshan ^{[1
]}

Hu, Jie ^{[2
]}

机构：

[1] Beijing Inst Technol, Sch Opt & Photon, Beijing 100081, Peoples R China

[2] Beijing Inst Technol, Sch Mech Engn, Laser Micro Nano Fabricat Lab, Beijing 100081, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2018年 / 18卷 / 24期

基金：

国家重点研发计划;

关键词：

Fiber optic sensors; Fabry-Perot; femtosecond laser fabrication; temperature measurement; pressure measurement; YOUNGS MODULUS; FIBER; DEPENDENCE;

D O I：

10.1109/JSEN.2018.2875435

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fiber-optic hybrid sensor based on dual-cavity Fabry-Perot interferometers is proposed and demonstrated for the simultaneous measurement of high temperature and high pressure. The proposed sensor is fabricated by fusion splicing of two single-mode fibers (SMFs), a hollow core fiber (HCF), and a cureless fiber (CF), forming a four-section structure of leading SMF-SMF-HCF-CF. A micro-hole is fabricated at the end of the leading SMF using a femtosecond laser, forming an air gap between two SMFs. The CF is thinned and roughened by the femtosecond laser to form a diaphragm. The SMF-based cavity is used as the temperature sensor and the HCF-based cavity as the pressure sensor. Lengths of two cavities are interrogated simultaneously by using the fast Fourier transform-based white-light interferometry. Experimental results show that the proposed sensor exhibits a temperature sensitivity of 19.8 nm/degrees C and a pressure sensitivity of similar to 98 nm/MPa, within the temperature range of 20 degrees C-800 degrees C and the pressure range of 0-10 MPa. The maximum measurement errors of temperature and pressure are 5 degrees C and 0.2 MPa, respectively. As far as we know, it is the first time to detect the temperature of 800 degrees C and the pressure of 10 MPa simultaneously.

引用

页码：10028 / 10033

页数：6

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