Investigation of layered SAW sensors based on a WO3/ZNO/64° YX LiNbO3 structure with gold catalytic layer

被引：1

作者：

Sivan, VP ^{[1
]}

Ippolito, SJ ^{[1
]}

Kandasamy, S ^{[1
]}

Kalantar-Zadeh, K ^{[1
]}

Wlodarski, W ^{[1
]}

Holland, A ^{[1
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Syst Engn, Melbourne, Vic, Australia

来源：

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II | 2005年 / 5650卷

关键词：

layered; WO3; gas sensor; hydrogen; catalytic; gold;

D O I：

10.1117/12.582222

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A layered Surface Acoustic Wave (SAW) hydrogen gas sensor, based on a delay line structure with 64 finger pairs on input and output port, is fabricated on 64 degrees Y-cut, X-propagating, LiNbO3 substrate. A guiding layer of ZnO is used to increase the sensitivity of the structure. A WO3 selective layer is employed to H-2 gas sensing applications at different operating temperatures between room temperature and 300 degrees C. In this paper, the fabrication process of WO3/ZnO/64 degrees YX LiNbO3 sensor is described and the sensor's response features are analyzed. The improvement of the response with the addition of a gold catalytic layer on the sensor surface is also investigated.

引用

页码：276 / 284

页数：9

共 50 条

[41] Camphor Sulfonic Acid Doped Polyaniline/Diamond Nanofibers Based ZnO/64° YX LiNbO3 Surface Acoustic Wave H2 Gas Sensor
Arsat, R.
Tan, J.
Sadek, A. Z.
Shin, K.
Ahn, D. S.
Yoon, C. S.
Kalantar-Zadeh, K.
Wlodarski, W.
SENSOR LETTERS, 2008, 6 (06) : 947 - 950
[42] Spurious Mode Suppression in Multiple Layer HfO2/Simax Acoustical Mirror Structure for ILAW on 15°-YX LiNbO3
Zhgoon, S.
Shvetsov, A.
Bhattacharjee, K.
2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2011, : 547 - 550
[43] Effect of Seed Layer Structure on Surface Morphology and Photoluminescence Property of ZnO Nanorods Grown on LiNbO3 Substrate
Water, Walter
Jhao, Ren-Yang
INTEGRATED FERROELECTRICS, 2013, 143 (01) : 116 - 121
[44] Theoretical and experimental study of propagating Lamb wave mode caused by the SAW in glass plate/thin water layer/128YX-LiNbO3 structure
Kondoh, Jun
Tsubouchi, Moe
Mitsuyoshi, Ryota
Terakawa, Yota
INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021), 2021,
[45] Hydrogen sensors based on Pd-doped WO3 nanostructures and the morphology investigation for their sensing performances optimization
Boudiba, Abdelhamid
Zhang, Chao
Snyders, Rony
Olivier, Marie-Georges
Debliquy, Marc
EUROSENSORS XXV, 2011, 25
[46] Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices
Dekkar, Damia
Benedic, Fabien
Floer, Cecile
Hage-Ali, Sami
Brinza, Ovidiu
Achard, Jocelyn
Elmazria, Omar
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2018, 215 (22):
[47] Highly efficient ZnO/WO3 nanocomposites towards photocatalytic gold recovery from industrial cyanide-based gold plating wastewater
Sangkhanak, Satjaporn
Kunthakudee, Naphaphan
Hunsom, Mali
Ramakul, Prakorn
Serivalsatit, Karn
Pruksathorn, Kejvalee
SCIENTIFIC REPORTS, 2023, 13 (01)
[48] Highly efficient ZnO/WO3 nanocomposites towards photocatalytic gold recovery from industrial cyanide-based gold plating wastewater
Satjaporn Sangkhanak
Naphaphan Kunthakudee
Mali Hunsom
Prakorn Ramakul
Karn Serivalsatit
Kejvalee Pruksathorn
Scientific Reports, 13
[49] Surface acoustic wave characteristics based on c-axis (006) LiNbO3/diamond/silicon layered structure
Zhou, Changjian
Yang, Yi
Zhan, Jing
Ren, Tianling
Wang, Xinchang
Tian, Sifang
APPLIED PHYSICS LETTERS, 2011, 99 (02)
[50] Effect of humidity on the properties of NO2 sensors based on thin WO3 and SnO2 films modified with gold
E. Yu. Sevastyanov
N. K. Maksimova
F. V. Rudov
N. V. Sergeichenko
E. V. Chernikov
Russian Journal of Physical Chemistry A, 2015, 89 : 447 - 452

← 1 2 3 4 5 →