Investigation of layered SAW sensors based on a WO3/ZNO/64° YX LiNbO3 structure with gold catalytic layer

被引：1
|
作者：
Sivan, VP [1 ]
Ippolito, SJ [1 ]
Kandasamy, S [1 ]
Kalantar-Zadeh, K [1 ]
Wlodarski, W [1 ]
Holland, A [1 ]
机构：
[1] RMIT Univ, Sch Elect & Comp Syst Engn, Melbourne, Vic, Australia
来源：
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II | 2005年 / 5650卷
关键词：
layered; WO3; gas sensor; hydrogen; catalytic; gold;
D O I：
10.1117/12.582222
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A layered Surface Acoustic Wave (SAW) hydrogen gas sensor, based on a delay line structure with 64 finger pairs on input and output port, is fabricated on 64 degrees Y-cut, X-propagating, LiNbO3 substrate. A guiding layer of ZnO is used to increase the sensitivity of the structure. A WO3 selective layer is employed to H-2 gas sensing applications at different operating temperatures between room temperature and 300 degrees C. In this paper, the fabrication process of WO3/ZnO/64 degrees YX LiNbO3 sensor is described and the sensor's response features are analyzed. The improvement of the response with the addition of a gold catalytic layer on the sensor surface is also investigated.
引用
收藏
页码：276 / 284
页数：9
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