Review in manufacturing methods of nanochannels of bio-nanofluidic chips

被引：73

作者：

Chen, Xueye ^{[1
]}

Zhang, Lei ^{[1
]}

机构：

[1] Liaoning Univ Technol, Fac Mech Engn & Automat, Jinzhou 121001, Peoples R China

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2018年 / 254卷

关键词：

Nanochannels; Manufacturing method; Bio-nanofluidic chips; Nanofluidics; Application; NANOIMPRINT LITHOGRAPHY; BOTTOM-UP; FABRICATION; NM; PROTEIN; ARRAYS; SEPARATION; TRANSPORT; PLATFORMS; SYSTEMS;

D O I：

10.1016/j.snb.2017.07.139

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This review reports the progress on the recent development of manufacturing methods of nanochannels of bio-nanofluidic chips. Various manufacturing methods including reactive ion etching, high energy beam processing method, interference lithography, nanoimprinting, thin film deposition processing technology, hot embossing, stress release processing technology, molecular self-assembly processing technology, PDMS deformation processing and biofabrication of nanochannels are illustrated and discussed. The advantages and disadvantages of each manufacturing methods are expatiated. A variety of bio-nanofluidic chips fabricated with different manufacturing methods are also expounded and analyzed. This paper will provide a particularly convenient and valuable reference to those who intend to research the fabrication of bio-nanofluidic chips. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：648 / 659

页数：12

共 91 条

[1] Protein detecting arrays based on cationic polythiophene-DNA-aptamer complexes [J].

Aberem, Maite Bera ;

Najari, Ahmed ;

Ho, Hoang-Anh ;

Gravel, Jean-Francois ;

Nobert, Philippe ;

Boudreau, Denis ;

Leclerc, Mario .

ADVANCED MATERIALS, 2006, 18 (20) :2703-+

[2] Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting [J].

Ahn, Se Hyun ;

Guo, L. Jay .

ACS NANO, 2009, 3 (08) :2304-2310

[3] Geometrical control of ionic current rectification in a configurable nanofluidic diode [J].

Alibakhshi, Mohammad Amin ;

Liu, Binqi ;

Xu, Zhiping ;

Duan, Chuanhua .

BIOMICROFLUIDICS, 2016, 10 (05)

[4] Comparison of linear and ring DNA macromolecules moderately and strongly confined in nanochannels [J].

Benkova, Zuzana ;

Cifra, Peter .

BIOCHEMICAL SOCIETY TRANSACTIONS, 2013, 41 :625-629

[5] Flexible fabrication and applications of polymer nanochannels and nanoslits [J].

Chantiwas, Rattikan ;

Park, Sunggook ;

Soper, Steven A. ;

Kim, Byoung Choul ;

Takayama, Shuichi ;

Sunkara, Vijaya ;

Hwang, Hyundoo ;

Cho, Yoon-Kyoung .

CHEMICAL SOCIETY REVIEWS, 2011, 40 (07) :3677-3702

[6] Numerical and experimental investigation on micromixers with serpentine microchannels [J].

Chen, Xueye ;

Li, Tiechuan ;

Zeng, Hong ;

Hu, Zengliang ;

Fu, Baoding .

INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 2016, 98 :131-140

[7] An effective PDMS microfluidic chip for chemiluminescence detection of cobalt (II) in water [J].

Chen, Xueye ;

Liu, Chong ;

Xu, Zheng ;

Pan, Yuzhen ;

Liu, Junshan ;

Du, Liqun .

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 19 (01) :99-103

[8] Nanofabrication by electron beam lithography and its applications: A review [J].

Chen, Yifang .

MICROELECTRONIC ENGINEERING, 2015, 135 :57-72

[9] Fabrication of 2D polymer nanochannels by sidewall lithography and hot embossing [J].

Cheng, E. ;

Zou, Helin ;

Yin, Zhifu ;

Jurcicek, Petr ;

Zhang, Xi .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2013, 23 (07)

[10]

Cheng E., 2014, J MICROMECH MICROENG, V24

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