Determination of Young's modulus of electroplated nickel

被引：50
作者：
Fritz, T
Griepentrog, M
Mokwa, W
Schnakenberg, U
机构：
[1] Univ Aachen, Inst Mat Elect Engn 1, D-52074 Aachen, Germany
[2] Fed Inst Mat Res & Testing, D-12205 Berlin, Germany
来源：
ELECTROCHIMICA ACTA | 2003年 / 48卷 / 20-22期
关键词：
nickel; electroplating; nickelsulfamate electrolyte; MEMS; Young's modulus;
D O I：
10.1016/S0013-4686(03)00370-0
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Electroplated nickel is a promising material to realise movable Structures for micro-electro-mechanical systems (MEMS) applications. The determination of mechanical parameters are of significant interest for their optimum design. Nickel was electroplated using a nickelsulfamate electrolyte tinder pulse-plating conditions. Young's modulus Was determined by comparison of different measuring techniques: laser-acoustic method, instrumented microindentation test as well as resonance frequency measurements of laterally and vertically swinging cantilevers. For nickel layers deposited with a mean current density of 2 mA/ cm(2), Young's modulus values of about 205 GPa were observed. The values decreased to about 165 GPa when increasing the mean current density to 20 mA/cm(2). This behaviour can be explained by texture effects. (C) 2003 Elsevier Ltd. All rights reserved.
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页码：3029 / 3035
页数：7
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