Highly Stable Transparent Amorphous Oxide Semiconductor Thin-Film Transistors Having Double-Stacked Active Layers

被引:139
作者
Park, Jae Chul [2 ]
Kim, Sangwook [2 ]
Kim, Sunil [2 ]
Kim, Changjung [2 ]
Song, Ihun [2 ]
Park, Youngsoo [2 ]
Jung, U-In [2 ]
Kim, Dae Hwan [1 ]
Lee, Jang-Sik [3 ]
机构
[1] Kookmin Univ, Sch Elect Engn, Seoul 136702, South Korea
[2] Samsung Adv Inst Technol, Yongin 446712, South Korea
[3] Kookmin Univ, Sch Adv Mat Engn, Seoul 136702, South Korea
关键词
ELECTRONIC-STRUCTURE; CARRIER TRANSPORT; A-INGAZNO4-X; DISPLAY; ORIGINS; TFT;
D O I
10.1002/adma.201002397
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A novel device structure is presented for amorphous oxide semiconductor thin-film transistors with high performance as well as improved electrical/optical stress stability. The highly stable transistor devices are developed using composition-modulated dual active layers. This approach could potentially be used to fabricate product-level display devices using amorphous oxide semiconductors in the near future.
引用
收藏
页码:5512 / 5516
页数:5
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