Advanced X-ray Optics with Si Wafers and Slumped Glass

被引：6

作者：

Hudec, R. ^{[1
,6
]}

Marsikova, V. ^{[2
,4
]}

Mika, M. ^{[4
]}

Sik, J. ^{[5
]}

Lorenc, M. ^{[5
]}

Pina, L. ^{[2
,3
]}

Inneman, A. ^{[2
]}

Skulinova, M. ^{[1
]}

机构：

[1] Acad Sci Czech Republic, Inst Astron, CS-25165 Ondrejov, Czech Republic

[2] RITE, Prague, Czech Republic

[3] Czech Tech Univ, Fac Nucl Sci, Prague, Czech Republic

[4] Inst Chem Technol, Prague, Czech Republic

[5] ON Semicond, Roznov Radhostem, Czech Republic

[6] Czech Tech Univ, Fac Elect Engn, Prague, Czech Republic

来源：

OPTICS FOR EUV, X-RAY, AND GAMMA-RAY ASTRONOMY IV | 2009年 / 7437卷

关键词：

LOBSTER-EYE; SILICON; FUTURE;

D O I：

10.1117/12.827978

中图分类号：

P1 [天文学];

学科分类号：

0704 ;

摘要：

We report on the continuation of the development of test samples of astronomical x-ray optics based on thermally formed glass foils and on bent Si wafers. Experiments with thermal glass forming have continued adding wider range of evaluated and optimized parameters including viscosity and internal stress analyses, as well as investigation of mounting influences. Experiments with Si wafers focused on their quality improvements such as flatness and thickness uniformity in order to better meet the requirements of future X-ray astronomy projects applications, as well as on study of their surface quality, defects analysis, and methods for its reproducible measurement.

引用

页数：12

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