Effect of Cu surface treatment in graphene growth by chemical vapor deposition
被引:8
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作者:
Cho, Seong-Yong
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机构:
Myongji Univ, Coll Engn, Dept Mat Sci & Engn, Yongin 17058, Gyeonggi, South KoreaMyongji Univ, Coll Engn, Dept Mat Sci & Engn, Yongin 17058, Gyeonggi, South Korea
Cho, Seong-Yong
[1
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Kim, Minsu
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Seoul Natl Univ, Coll Engn, Dept Mat Sci & Engn, Seoul 08826, South KoreaMyongji Univ, Coll Engn, Dept Mat Sci & Engn, Yongin 17058, Gyeonggi, South Korea
Kim, Minsu
[2
]
Kim, Min-Sik
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Seoul Natl Univ, Coll Engn, Dept Mat Sci & Engn, Seoul 08826, South KoreaMyongji Univ, Coll Engn, Dept Mat Sci & Engn, Yongin 17058, Gyeonggi, South Korea
Kim, Min-Sik
[2
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Lee, Min-Hyun
[3
]
Kim, Ki-Bum
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Seoul Natl Univ, Coll Engn, Dept Mat Sci & Engn, Seoul 08826, South KoreaMyongji Univ, Coll Engn, Dept Mat Sci & Engn, Yongin 17058, Gyeonggi, South Korea
Kim, Ki-Bum
[2
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机构:
[1] Myongji Univ, Coll Engn, Dept Mat Sci & Engn, Yongin 17058, Gyeonggi, South Korea
[2] Seoul Natl Univ, Coll Engn, Dept Mat Sci & Engn, Seoul 08826, South Korea
[3] Samsung Adv Inst Technol, Suwon 16678, Gyeonggi, South Korea
Cu foils with various initial roughness were prepared and graphene was grown on each Cu foil. Graphene nuclei density was highly related to the initial surface roughness of Cu foil. Smoothing was done on Cu foil and initial roughness was relieved during 3 h annealing, but Cu surface with high surface roughness and impurity atoms provides larger nuclei density for the graphene growth. Heteronuclei effect of size variations of impurity atoms on multilayer graphene formation was calculated. Electropolishing was carried out to suppress the heteronuclei effect and the nuclei formation on Cu surface as well. For electropolished Cu substrate, nuclei density of graphene was extremely low even without extended pre-annealing step. (C) 2018 Elsevier B.V. All rights reserved.
机构:
Fudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Gao, Xiuli
Xiao, Runhan
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机构:
Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
Univ Chinese Acad Sci, 19A Yuquan Rd, Beijing 100049, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Xiao, Runhan
Zhang, Yanhui
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Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Zhang, Yanhui
Chen, Zhiying
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Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Chen, Zhiying
Kang, He
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机构:
Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
Univ Chinese Acad Sci, 19A Yuquan Rd, Beijing 100049, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Kang, He
Wang, Shuang
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机构:
Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
Univ Chinese Acad Sci, 19A Yuquan Rd, Beijing 100049, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Wang, Shuang
Zhao, Sunwen
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机构:
Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
Univ Chinese Acad Sci, 19A Yuquan Rd, Beijing 100049, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Zhao, Sunwen
Sui, Yanping
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Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Sui, Yanping
Yu, Guanghui
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Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
Yu, Guanghui
Zhang, Wei
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Fudan Univ, Sch Microelect, Shanghai 200082, Peoples R ChinaFudan Univ, Sch Microelect, Shanghai 200082, Peoples R China
机构:
Ajou Univ, Dept Energy Syst Res, Suwon 16499, Gyeonggi Do, South Korea
Ajou Univ, Dept Mat Sci & Engn, Suwon 16499, Gyeonggi Do, South KoreaAjou Univ, Dept Energy Syst Res, Suwon 16499, Gyeonggi Do, South Korea
Kim, Seung-il
Heo, Keun
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机构:
Sungkyunkwan Univ, Coll Informat & Commun Engn, Suwon 16419, Gyeonggi Do, South KoreaAjou Univ, Dept Energy Syst Res, Suwon 16499, Gyeonggi Do, South Korea
Heo, Keun
Lee, Jae-Hyun
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Ajou Univ, Dept Energy Syst Res, Suwon 16499, Gyeonggi Do, South Korea
Ajou Univ, Dept Mat Sci & Engn, Suwon 16499, Gyeonggi Do, South KoreaAjou Univ, Dept Energy Syst Res, Suwon 16499, Gyeonggi Do, South Korea
机构:
Hong Kong Polytech Univ, Inst Text & Clothing, Kowloon, Hong Kong, Peoples R ChinaHong Kong Polytech Univ, Inst Text & Clothing, Kowloon, Hong Kong, Peoples R China
Zhang, Xiuyun
Wang, Lu
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Hong Kong Polytech Univ, Inst Text & Clothing, Kowloon, Hong Kong, Peoples R ChinaHong Kong Polytech Univ, Inst Text & Clothing, Kowloon, Hong Kong, Peoples R China
Wang, Lu
Xin, John
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Hong Kong Polytech Univ, Inst Text & Clothing, Kowloon, Hong Kong, Peoples R ChinaHong Kong Polytech Univ, Inst Text & Clothing, Kowloon, Hong Kong, Peoples R China
Xin, John
Yakobson, Boris I.
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机构:
Rice Univ, Dept Chem, Dept Mech Engn & Mat Sci, Houston, TX 77005 USA
Rice Univ, Richard E Smalley Inst Nanoscale Sci & Technol, Houston, TX 77005 USAHong Kong Polytech Univ, Inst Text & Clothing, Kowloon, Hong Kong, Peoples R China
Yakobson, Boris I.
Ding, Feng
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机构:
Hong Kong Polytech Univ, Inst Text & Clothing, Kowloon, Hong Kong, Peoples R China
Rice Univ, Dept Chem, Dept Mech Engn & Mat Sci, Houston, TX 77005 USA
Rice Univ, Richard E Smalley Inst Nanoscale Sci & Technol, Houston, TX 77005 USAHong Kong Polytech Univ, Inst Text & Clothing, Kowloon, Hong Kong, Peoples R China