Temperature and frequency dependence of dielectric properties of (Pb, La)(Zr, Sn, Ti)O3 antiferroelectric thin films on LaNiO3 bottom electrode with different sheet resistance

被引:10
作者
Hao, Xihong [1 ,2 ]
Zhai, Jiwei [1 ]
Jia, Qunping [1 ]
Shen, Bo [1 ]
Yao, Xi [1 ]
机构
[1] Tongji Univ, Funct Mat Res Lab, Shanghai 200092, Peoples R China
[2] Inner Mongolia Univ Sci & Technol, Coll Mat & Met, Baotou 014010, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1088/0022-3727/41/16/165403
中图分类号
O59 [应用物理学];
学科分类号
摘要
Via the sol-gel process (Pb0.97La0.02)(Zr0.87Sn0.10Ti0.03)O-3 (PLZST 2/87/10/3) antiferroelectric thin films were deposited on a metalorganic decomposition derived LaNiO3 (LNO) bottom electrode. The phase structure and microstructure of LNO and PLZST 2/87/10/3 thin films were analysed by an x-ray diffractometer (XRD) and a scanning electron microscope (SEM). The effect of the LNO bottom electrode with various sheet resistances on the dielectric proper-ties of PLZST 2/87/10/3 anti ferroelectric thin films was investigated in detail as a function of frequency, temperature and dc electric field. A simple model was presented to explain the nature of LNO bottom electrode based capacitors.
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页数:7
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