Vibration mode analysis on piezoelectric diaphragms for ultrasonic microsensors

被引：0
|
作者：
Nishiumi, Taiki [1 ]
Yamashita, Kaoru [1 ]
Tanaka, Hikaru [1 ]
Arai, Kaito [1 ]
Noda, Minoru [1 ]
机构：
[1] Kyoto Inst Technol, Grad Sch Sci & Technol, Kyoto 6068585, Japan
来源：
2015 IEEE INTERNATIONAL MEETING FOR FUTURE OF ELECTRON DEVICES, KANSAI (IMFEDK) | 2015年
关键词：
ultrasonic sensors; resonant mode; piezoelectric; charge distribution; sensitivity; SENSITIVITY IMPROVEMENT;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Piezoelectric diaphragm-type ultrasonic microsensors were fabricated and their vibration modes were investigated from the viewpoint of sensitivity affected by the distribution of piezoelectrically induced polarization. Three kinds of diaphragms were fabricated with the geometries of square-flat, square-buckled and circular-buckled, to clarify the effect of the diaphragm geometry to higher-order vibrations generated by a received ultrasound pulse. The square-flat diaphragms showed less higher-order vibrations compared to the square-buckled ones, and the circular-buckled showed even less higher-order vibration among them and is the suitable geometry for the piezoelectric diaphragm sensors.
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页数：2
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